Discussion on ISO 14644-3:2019 Cleanrooms and associated controlled environments—Part 3: Test methods—Review and segregation test

Tu You1, Tu Guangbei2

2024.11.22

The ISO 14644-3 “testing method” is an important part of the series of standards for cleanrooms and associated controlled environments. ISO 14644-3:2019 is the first revision of this standard since it was issued more than ten years ago. In addition to revising and modifying some complicated test methods in the old version issued in 2005, the new version also adds some testing items and related contents according to the needs of technical developments and application experiences. This article provides a comprehensive comparison and review of the new and old versions, in order to gain a better understanding of the new version and provide some references for the corresponding revisions of relevant domestic standards. The segregation test is a new test item in the new version, and this paper briefly presents its related concepts and specific methods.